Narrowband multilayer coatings for the extreme ultraviolet range of 50-92 nm

Narrowband multilayer coatings for the extreme ultraviolet range of 50-92 nm.

A new type of multilayer coatings with narrowband reflection properties and peaked in the approximately 50- 92 nm spectral range has been developed. Multilayers are based on Yb, Al, and SiO films and they have been prepared by thermal evaporation. Efficient multilayers based on Yb and Al, with an SiO protective layer were prepared, but they developed a dendrite structure, which was attributed t...

Lifetime Studies of Mo/Si and MO/Be Multilayer Coatings for Extreme Ultraviolet Lithography

Extreme Ultraviolet Lithography (EUVL) is a candidate for future application by the semiconductor industry in the production of sub-100 nm feature sizes in integrated circuits. Using multilayer reflective coatings optimized at wavelengths ranging from 11 to 14 nm, EUVL represents a potential successor to currently existing optical lithography techniques. In order to assess lifetimes of the mult...

Wavelength selection for multilayer coatings for lithography generation beyond extreme ultraviolet

Nonoxidized Al-overcoated Ir bilayers with high reflectance in the extreme ultraviolet above 50 nm

Juan I. Larruquert José A. Méndez José A. Aznárez Instituto de Fı́sica Aplicada-CSIC C/Serrano 144 28006-Madrid, Spain E-mail: [email protected] Abstract. Bilayers of a thin, nonoxidized Al film over an Ir film are prepared. The bilayers are intended to enhance the reflectance of Al below the Al plasma wavelength (lp;83 nm). Above lp the bilayers have a high reflectance comparable to that of...

Phase effects owing to multilayer coatings in a two-mirror extreme-ultraviolet schwarzschild objective.

The aberrations of a multilayer-coated reflective Schwarzschild objective, which are influenced both by mirror surface profiles and by multilayer coatings, are evaluated with a phase-shifting point diffraction interferometer operating in the extreme ultraviolet. Using wave-front measurements at multiple wavelengths near 13.4 nm, we observed chromatic aberrations and wavelength-dependent transmi...